· pure water treated with reverse osmosis, distillation, ion or Elix pretreatment as water inlet

Resistivity: 18.2 M Ω. Cm @ 25 ℃

· total organic carbon: TOC: <10ppb

· heat source content: <0.001EU/ml

· particulate matter: <1ml (< 0.2 mu m)

· microorganisms: <1cfu/ml

· flow rate: 1.5l/min

· operating weight: 16.6Kg

· size: 45.7x25.5x31.5cm